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Process center is responsible for the establishment of 8-inch process platform, characteristic process development, platform operation, small batch production of characteristic products, etc. The center has more than 120 sets of process and measurement equipment, feature size: 130nm, pilot production capacity: 3000 pieces/month. According to the process module, process center includes process integration, lithography, etching, film, and diffusion. It has also sets expert office to attract a wide range of industry senior experts.
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